高纯有机试剂国内外标准比较分析

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Comparative Analysis of Domestic and International Standards for High Purity Organic Reagents

SHI Zeyuan ZHANG Junhua CAO Kewei WUYiran ZHAO Junsha

(China Electronics Standardization Institute)

Abstract:Highpurityorganicreagents,belongingtothecategoryofhighpurityreagentsinelectronicchemicals,areone of theraw materials forcompounding functional electronicchemicals,which are widelyused invarious processes in the semiconductorindustrysuchas integratedcircuitsanddisplay.Withthecontinuous terationofthe integrated circuit process, therequirements forhighpurityorganicreagents havebeen gradualyincreased.Atpresent,sincetherearecircumstancesof mismatchingand inapplicabilitybetweenstandardsandtheindustry,itisdificultogive playtothesupporting andleading roleoftandards.Thispaperstartswiththedevelopmentstatusanddemandofelectronicchemicalsindustrysystem,sortsout andanalyzesthestandards status,and puts forwardthe ideasandsuggestionsonthesystematic developmentofhigh purity organic reagent standards.

Keywords:electronic chemicals;high purityorganic reagents; standards; standards system

0 引言

电子化学品（ElectronicChemicals）国际上统称为工艺化学品（ProcessChemicals），又称湿化学品（WetChemicals），其主体成分或原材料纯度大于 99.99% ，杂质离子和微粒数符合严格要求的化学试剂，主要用于集成电路、显示面板、光伏组件等电子元器件和模组生产中的清洗、光刻、刻蚀、显影、互联等工艺，其纯度和洁净度对电子元器件和模组的成品率、电学性能及可靠性都有十分重要的影响。（剩余5899字）