分布式近场超声悬浮装置的理论分析与实验研究

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中图分类号：TB126 文献标志码：B 文章编号：1671-5276（2025）05-0046-04

Theoretical Analysis and Experimental Study on Distributed Near-field Acoustic Levitation Device

XU Xinyu，CHEN Fulin

Abstract：Insolar panel production process，silicon wafers，asessntial materials，ned tobe transported between various processing steps.To avoid the scratching and damage issues caused by traditionalcontactbelt transportation，theoretical analysis and experimental research areconductedona distributed near-fieldultrasonic levitation device，with the focus onvalidatingitsultrasoniclevitationefectanditsflexibleapplicationcapabilities.Thisstudyadoptsthedynamic lubrication theoryin fluid mechanics tocalculatethe levitation force.Adistributednear一fieldultrasoniclevitation experimental platform is constructed to verifyits levitation performance.Theexperiment shows thatthedistributed near -field ultrasonic levitation devicecanprovidea stable levitation force for the suspendedobject with high flexibility in application.

Keywords：near-field acoustic levitation;distributed;levitation force;transducer;flexibilit

0 引言

实现对悬浮物体的悬浮支撑，考虑到悬浮力会随着悬浮高度的降低而显著增大，可以实现对悬浮物体的稳定悬浮[7]。（剩余5730字）