对称驱动式层叠压电泵的设计

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中图分类号：TP391.9 文献标志码：B 文章编号：1671-5276（2025）03-0048-04

Design of Symmetrical Drive Laminated Piezoelectric Pump

HAO Yunfeng，SHI Shuzheng，WU Huiqiang，ZHANG Landi （School of Mechanical Engineering，Hebei University of Architecture，Zhangjiakou O75Ooo，China）

Abstract：Piezoelectricpumpisanewmicrofluidicconveyinginstrumentwhichrealizesdirectionalflowofliquidbyusing inverse piezoelectricefectof piezoelectric materials.Toadesstheproblemsoflimitedoutputcapacityduetoverysmalldeforationof piezoelectricmaterialandthelowconventionalpiezoelectricpumpoperatingfrequencyleading tofailureintakeingfulladvantage ofthehigh powerdensityofpiezoelectricmaterialsathighfrequency，anovellaminateddouble-cavityparalelpiezoelectric pump is developed byusing flexure hinge displacement amplifying mechanism toamplifytheoutput displacementof piezoelectric ceramics whichdrivestwopiezoelectricpositive pumpssymmetrically.Through finite elementanalysis，theflexiblehinge amplifying mechanismandthesimple modelof thepiezoelectricpumparesimulated.Theresultsshowthatthe magnificationof theflexible hingedisplacementamplifying mechanismcanreach4.2，andthe working frequencyofthepiezoelectric pumpcanbe ashighas4218Hzunderthesymmetricdrivingcondition，whichgreatlyimprovesthetheoreticalworking frequencyof the piezoelectric pump.

Keywords：flexure hinge；piezoelectric stack；in parallel；piezoelectric pump

0 引言

压电泵是一种利用压电材料产生变形驱动流体定向传输的微型泵[1-2]。（剩余4934字）