MEMS汽车压力传感器的长期稳定性测试与失效模式分析

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2.The13th Research Instituteof China Electronics Technology Group Corporation，Shijiazhuang O5ooo0，China）

【Abstract】Aiming at the problemof insuffcient long-term stability of automotive pressure sensors，thisarticle proposes a suspended sealing structure design， adopts the aluminum alloy - ceramic composite packaging process， combined with the temperaturecompensationalgorithm.Through theconstruction of anacceleratedaging testplatform with temperatureandpressrecycles for testing，theresults showthat this designreduces the temperature drift from ± 1.8%FS to ±0.28%FS .The output attenuation after 5Oo hours of pressure cycling isless than 0.5% FS.Failure analysis showsthat interface delaminationisthe main problem，accountingfor 62% .Theshear strengthisincreasedby 37% after optimization with a O.5mm silica gel buffer layer.

【Key words】MEMS pressure sensor;long-term stability；ceramic packaging；temperature compensation algorithm; failure mode analysis

0 引言

在汽车电子控制系统中，压力传感器作为发动机管理、制动系统等核心模块的感知单元，其长期稳定性直接影响行车安全与系统可靠性。（剩余3764字）