耐恶劣环境热式流量传感器设计与研究

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中图分类号：TP212 文献标志码：A 文章编号：2095-2945(2025)23-0011-04

Abstract:Inresponse tothedemandforcoolantflow measurementinnuclearpowerplantreactorsunderiradiation,high temperature,andhighpresureenvironments，thispaperdesignsanddevelopsaharshenvironmentresistantthermalflowsensor basedonheat exchange principlesandMEMStechnology.Thesensorconsistsofthreeparts:probe,lead,andtransmiter.The probestructureismainlycomposedofceramicsensitiveelements，reinforcedbrackets，andshellsealedsinteredparts.The ceramicsensitiveelementsareprocessedandfabricatedonaceramicsubstrateusingMEMStechnologytoformplatinumthin filmsensitiveelectrodes，andtheprobestructureisencapsulatedusingglasssinteringtechnologytowithstandhightemperature andhighvoltage.Finall,themechanicalfasteningmethodwasusedtoassmbleteprototyeoftheharshenvironmentresistant thermalflowsensor，andtheprototypewastested.Thetestresultsshowedthatthisharshenvironment-resistantthermalflow sensorcanmeettherequirementsofcoolantflowmeasurementinirdiation，high-temperature,andhigh-pressureenviromnts.

Keywords: heat exchange principle; MEMS; harsh environment resistance; thermal flow sensor; prototype

由于核电站的核反应堆事故频发，如著名的切尔诺贝利核电站事故、福岛核电站事故等，国内外对核电站反应堆安全性能的需求不断增加，反应堆自然循环的流量检测越来越受到重视[-3]。（剩余6318字）