基于傅里叶级数的时栅位移随机误差降低方法

打开文本图片集

中图分类号：TP212；TH7 文献标识码：A 文章编号：2096-4706（2025）15-0032-06

Abstract：Modern high-end equipment manufacturing puts forward higher requirements for the ability of precision displacement measurement to suppress random errors. In order to suppressthe random error of the time grating displacement sensor，aphase measurement methodbasedonFourierseries is proposed.This methodcombines theHanning windowtoreduce the Gibbs phenomenoncaused bysignaltruncation.Atthesametime，theAltematingDirection MethodofMultipliers isused todecomposetheFourieranalysisintofrequencyanalysisandphaseanalysisforcollaborativeoptimization，soastoaccurately completethesignalmodelingandobtainaccurateangle information.Thesimulationresultsshowthatthemethodsignificantly reduces the random measurement errorand improves the measurement resolution.The experimental test iscarredouton 120 pairs of electric field circular time grating sensors.The actual random error and actual resolution of the sensor are 1′′ and 1.2′′ respectively，which are 29% and 42% higher than those of high-frequency pulse interpolation.

Keywords： time-grid displacement sensor;Fourier series; Hanning window; Altermating Direction MethodofMultipliers

0 引言

高精度、稳定性的位移传感器在智能制造、精密医疗、无人驾驶、航空航天等领域至关重要[1-3]。（剩余7748字）