基于Simulink的多级真空泵系统建模与仿真研究

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中图分类号：TP391.9 文献标志码：A 文章编号：2095-2945（2025）30-0041-06

Abstract：Thisstudyaddresses the modeling，simulation，andmodelcalibrationof industrialvacuumsystems byproposinga 1Dsimulationmodelcapableofsimulatingthesequentialactivationprocessofmulti-stagevacuumpumps.Themodelintegrates theseriesconfigurationof pumps，system leakage，andthesequentialactivationanddeactivationmechanismsof multi-stage pumps.Byemployingapresure-threshold-basedsubmoduleactivationstrategy，itenablesdynamicsimulationofdiferentvacum stages.Simulationresultsindicatethatthemodelcanaccuratelycalculatetheevacuationprocessandtheultimatevacuum pressure，exhibitingstrongagreementwithexperimentaldata.Thisstudyprovidestheoreticalandengineringsupportforthe precise design of vacuum systems， optimization of vacuum equipment， and fault prediction.

Keywords：1D simulation model;vacuum system；parametercalibration;dynamic simulation；fault prediction

真空技术在工业生产中具有重要的跨学科应用价值，其应用范围涵盖化工合成、半导体制造、医疗器械灭菌及航天器地面测试等多个高新技术领域。（剩余5276字）