用Au离子注入 SiO₂ 基片合成的LSPR传感器 测量液体折射率

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中图分类号：TB47 文献标志码：A 文章编号：1003-5168（2025）11-0079-07

DOI：10.19968/j.cnki.hnkj.1003-5168.2025.11.017

LSPR Sensor Synthesized by Au Ion Implantation into SiO2 Substrate for Liquid Refractive Index Measurement

WANG Linfei1YU Quanyin1WANG Jun²LIU Changlong³

（1.Dongying Natural Gas Processing Station，Oil-gas Gathering and Transferring General Factory，Shengli Oil

field Branch，Dongying 257Ooo，China;2.CollegeofScience，China UniversityofPetroleum（EastChina），Qingdao 266580，China; 3.School of Science，Tianjin University，Tianjin30o072， China）

Abstract： [Purposes] An attempt is made to use the localized surface plasmon resonance （LSPR） sensor prepared by implanting metal ions into transparent insulator substrate to achieve accurate measurement of the refractive index of the liquid.[Methods] The LSPR sensor is prepared by implanting 3O keV Au ions into a 0.5-mm-thick SiO substrate ata fluence of 4.5×1016 ions·cm-2 ，whose structure is charac2 terized with atransmission electron microscope.With theaid of a fiber optic spectrometer，an experimental device is built to achieve the calibration of the LSPR sensorand the measurement of the refractive indices of transformeroil，parafinoil，castoroil，peanutoil，ink，and glycerol aqueous solution.[Findings] The synthesized LSPR sensor is quite stable in structure，and its characteristic reflection signal linearly depends in wavelength position on the refractive index of medium.Except for the ink，the measured results in refractive index of other liquids are consistent with the reference values.The refractive index of theink can be measured，and the obtained result is approximately 1.393.In the glycerol aqueous solution，the glycerol detection rate obtained by refractive index measurement is approximately . [Conclusions] The synthesized LSPR sensor can be used not only for the accurate measurement of the refractive indices of transparent and opaque liquids，but also for the detection of target substance from a twocomponent liquid mixture.

Keywords： ion implantation; localized surface plasmon resonance; sensor; liquid; refractive index

0 引言

折射率是物质的固有属性之一。（剩余12430字）