基于微环谐振器的微型电场与电流传感器设计研究

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关键词：微环谐振器；微型电场传感器；电流传感器；光栅耦合器；优化设计

中图分类号：TM917

文献标识码：A

DOI： 10.14106/j.cnki.1001-2028.2025.0025

引用格式：叶升言，李俊峰，程亮，等. 基于微环谐振器的微型电场与电流传感器设计研究[J]. 电子元件与材料， 2025， 44（2）： 157-164.

Reference format： YE Shengyan， LI Junfeng， CHENG Liang， et al. Design of miniaturized sensors for electric fields and currents utilizing micro-ring resonators [J]. Electronic Components and Materials， 2025， 44（2）： 157-164.

Design of miniaturized sensors for electric fields and currents

utilizing micro-ring resonators

YE Shengyan 1， LI Junfeng 1， CHENG Liang 1， YANG Yihu 1， MA Rui 2

（1. Dehong Power Supply Bureau of Yunnan Power Grid Co.， Ltd.， Dehong Prefecture 678499， Yunnan Province，

China; 2. Kunming Nengren Technology Co.， Ltd.， Kunming 650000， China）

Abstract：  Based on the principles of the electro-optic effect and magneto-thermal effect， the micro-electric field and current sensors based on micro-ring resonators were designed and optimized. By enhancing the configuration of the grating coupler and the micro-ring resonator， the sensitivity and quality factor of the sensors were improved. The experimental results indicate that under the influence of the DC electric field， the resonant wavelength of the electric field sensor significantly redshifts， with a quality factor as high as 5894 and an extinction ratio of 8.05 dB. For the current sensor， under AC current conditions， the resonant wavelength shift is proportional to the square of the current amplitude. And the sensitivity is 1.735， 3.297， and 5.227 nm/A2 for sensors with radii of 5 μm， 10 μm， and 15 μm， respectively. The findings demonstrate that the optimized sensors possess high sensitivity and excellent linear response characteristics， exhibiting comprehensive advantages in sensitivity， temperature stability， dimensional integration， and applicability， which could meet the actual needs of various application scenarios.

Keywords：micro-ring resonator; micro electric field sensor; current sensor; grating coupler; optimal design

在光电子学和传感器技术领域，微环谐振器凭借其高品质因数、小尺寸和对环境变化的高敏感性而成为研究的热点，在电场和电流传感方面具有巨大的应用潜力 [1-2]。（剩余8625字）