抗应变柔性温度传感器的设计与制造

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关键词：柔性温度传感器；抗应变；金属电极；电阻温度系数

中图分类号： TP212.1

文献标识码：A

DOI：10.14106/j.cnki.1001-2028.2025.1388

引用格式：姜涛，赵娜. 抗应变柔性温度传感器的设计与制造 [J]. 电子元件与材料， 2025， 44（2）： 152-156.

Reference format： JIANG Tao， ZHAO Na. Design and fabrication of strain-resistant flexible temperature sensors [J]. Electronic Components and Materials， 2025， 44（2）： 152-156.

Design and fabrication of strain-resistant flexible temperature sensors

JIANG Tao 1， ZHAO Na 2

（1. School of Electronic Information Engineering， Changchun University， Changchun 130000， China; 2. Jilin

Provincial Government Investment Fund Management Co.， Changchun 130000， China）

Abstract： To address the issue of insufficient strain resistance of flexible temperature sensors with metal electrode， a strain-resistant flexible temperature sensor was proposed with a "Serpentine" structural design， which was then fabricated and tested. The temperature and strain response were then theoretically analyzed to explore the temperature measurement principle and signal variation of the flexible temperature sensor under strain. Subsequently， photolithography and magnetron sputtering techniques were employed to make nickel electrode patterns on a polyimide substrate. The microstructure and element composition of the electrode surface were observed and analyzed using scanning electron microscopy （SEM） and energy dispersive spectroscopy （EDS）. Finally， the fabricated strain-resistant flexible temperature sensors were characterized by resistance temperature coefficient measurements and anti-strain interference tests. The experimental results show that the designed flexible temperature sensor has a resistance temperature coefficient of 0.0099/℃. The sensor demonstrates excellent strain resistance under various strain conditions while providing accurate and reliable temperature measurements.

Keywords： flexible temperature sensors; strain resistance; metal electrodes; resistive temperature coefficients

柔性温度传感器具有适用于不规则表面的测温、响应时间短、测温精度高等优点 [1]。（剩余5814字）