柔性氧化锌声表面波器件的研究

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关键词：磁控溅射；云母；ZnO；SrTiO3；声表面波谐振器

中图分类号：TN384

文献标识码：A

DOI： 10.14106/j.cnki.1001-2028.2025.1338

引用格式：刘兴鹏， 王明宣， 张永杰， 等. 柔性氧化锌声表面波器件的研究 [J]. 电子元件与材料，  2025，  44（2）： 135-141.

Reference format： LIU Xingpeng， WANG Mingxuan， ZHANG Yongjie， et al. Flexible ZnO surface acoustic wave devices [J]. Electronic Components and Materials， 2025， 44（2）： 135-141.

Flexible ZnO surface acoustic wave devices

LIU Xingpeng 1，2， WANG Mingxuan 1， ZHANG Yongjie 1， YANG Junfeng 2， DENG Weiping 1

（1.Guangxi Key Laboratory of Conformational Relationships of Electronic Information Materials，School of Information and

Communication，  Guilin University of Electronic Science and Technology， Guilin 541010，Guangxi Zhuang Autonomous

Region， China; 2. Guangzhou Tianji Electronics Technology Co.， Ltd.， Guangzhou 511453， China）

Abstract：  The ZnO piezoelectric thin films on the flexible mica substrates for Surface Acoustic Wave （SAW） resonators were investigated. ZnO piezoelectric thin films were optimized using the magnetron sputtering technique on the flexible mica substrates. The optimal growth conditions of the ZnO piezoelectric thin films were determined. The best process parameters were found to be the argon-to-oxygen flow rate ratio of 300∶20， the process pressure of 1.0 Pa， and the substrate heating temperature of 300 ℃. Under these parameters， the full width at half maximum （FWHM） of the rocking curve of the fabricated ZnO was 1.7°. A SrTiO3（STO） thermal expansion buffer layer was introduced between the ZnO thin film and mica to address the cracking of ZnO thin films caused by high-temperature annealing. This cracking was successfully prevented during annealing at 700 ℃ without affecting the quality of the c-axis crystallization of ZnO films， with the FWHM of the rocking curve of 2.0°.Using ultraviolet photolithography technology combined with the optimized ZnO thin films and STO buffer layer， a flexible SAW resonator of ZnO/STO/Mica was successfully fabricated. This resonator exhibits a resonant frequency of approximately 189 MHz.

Keywords： magnetron sputtering；micas；ZnO；SrTiO 3；acoustic surface wave resonator

声表面波（ Surface Acoustic Wave， SAW） 谐振器 [1-2]是一类利用压电材料制作的器件，它的谐振频率和环境温度、压力、应变等物理参数相关 [3-5]，通过检测其谐振频率的变化，可实现对温度、压力和应变等参数的检测 [6]。（剩余8091字）