激光直接成像机靶标识别算法的设计及抗扰性能测试

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关键词：激光直接成像；靶标识别算法；抗扰性能；离面位移

中图分类号：TH744；TP23

DOI：10.3969/j.issn.1004-132X.2025.07.025 开放科学（资源服务）标识码（OSID）：

Design and Anti-disturbance Performance Tests of Target Recognition Algorithm for LDI Machines

WANG Ruizhou1* ZHANG Yulong1 WANG Hua² ZHANG Xianmin³ 1.State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment， Guangdong University of Technology，Guangzhou，510006 2.Guangdong Provincial Engineering Technology Research Center of Digital Lithography， Guangdong KST Optical Co.，Ltd.，Dongguan，Guangdong，523000 3.Guangdong Provincial Key Laboratory of Precision Equipment and Manufacture Technology， South China University of Technology，Guangzhou，510641

Abstract： In LDI fields，disturbances caused the degradation of target recognition performance， and reduced the accuracy and efficiency of target alignment. A visual targeting device for LDI machines was designed.An adaptive point-selecting circle-searching strategy of random one point and random three points was proposed. The re-fitting was completed using the random sample consensus （RANSAC） method，and a target recognition algorithm was designed. The formation mechanism of disturbances was analyzed. A controllable and quantitative generation device for illumination conditions and out-of-focused-plane displacements was designed. The substrates containing typical targets with anomaly characteristics were fabricated.A quantitative generation and test system for the disturbances of LDI machines was completed. Test results demonstrate that the proposed target recognition algorithm for LDI machines possesses strong robustness against disturbances.

Key words： laser direct imaging（LDI）； target recognition algorithm；anti-disturbance perform ance；out-of-focused-plane displacement

0 引言

激光直接成像（laserdirectimaging，LDI）是一种无掩模光刻技术[]，它使用可编程激光束曝光印制电路板（printedcircuitboard，PCB）表面的光敏材料来实现图像转移。（剩余18781字）