基于密珠轴系的全圆角度基准装置研制

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中图分类号：TB9;TH71 文献标志码：A文章编号：1674-5124（2025）08-0098-09

Abstract： In response to the high-precision angle and angular rate calibration requirements of inertial device and angle encoder，as wellas the stabilityand low-cost requirements of the angle reference device axis system， this article has developed an angle reference device based on closed-packed bal bearings. Firstly，using the Ishape structure of Thrust bearing Radial bearing Thrust bearing，the shaft system structure is designed，the rotational accuracy of the developed shaft system reaches the sub-micron level. Secondly，the angle error model of the circular grating is analyzed，and the angle measurement system with four reading heads is built based on the EDA method， and a PID control system structure with filtering and feedforward control is designed and ±0.008 "steady-state positioning accuracy is realized. Finally based on cross-calibration method， the separation of angle measurement errors is completed，the Fourier series order distribution of angle position deviation is analyzed. Then a full-circle continuous angle compensation function is generated through linear interpolation method and the error compensation is completed.And a stability testing platform for angular velocity is built，the angular velocity stability testing is completed based on fixed angle and time measurement technology. Experimental results show that after angle compensation， the angle measurement accuracy of the angle reference device is 0.08′′ ， and the angle velocity stability of better than 0.05% ， the results have verified thefeasibility of developing a high-precision angle reference device based on mechanical shaft systems.

Keywords： angle reference device; dense ball bearing shafting; full combination; compensation; angle velocity stability

0 引言

角度和角速率的测量和校准，对于发展超精密检测仪器、基础物理研究、惯性导航以及基础精密工业元器件等有重要意义[1-3]。（剩余11419字）