压电精密位移台的非线性积分终端滑模跟踪控制

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中图分类号：TP273 文献标志码：A 文章编号：1671-8755（2025）03-0077-11

Abstract：The hysteresis nonlinear characteristics of piezoelectric platformsseverely affect their positioning accuracy. To enhance the displacement tracking accuracy，a novel nonlinear integral terminal sliding mode controllr（NITSMC）has been proposed to overcome the limitations of traditional terminal sliding mode controllers.Theoretical analysis indicates that the introduction of a new nonlinear integral terminal sliding surface successully decouples the maximum convergence time of the system state variables on thesliding surface from the initial state of the system，significantly improving the stability and consistency of the control system，which has been validated by Lyapunov theory. Experiments show that the tracking performance of NITSMC significantly outperforms that of traditional sliding mode control methods. Under sinusoidal test signal excitation in the frequency range of 1 to 100Hz ，the peak - to - valley average increment of the displacement tracking error for NITSMC is reduced by 38.49% and （204号 69.76% compared to the classical integral terminal sliding mode controller（CITSMC）and the classical sliding mode controller（CSMC），respectively.Additionally，NITSMC demonstrates higher tracking accuracy and robustness under multi-frequency varying amplitude sinusoidal harmonic signal excitation. NITSMC exhibits stronger stability and consistency，showing superior tracking accuracy and enhanced anti-jamming capability under complex dynamic conditions，providing an efective solution for high-precision control of the piezoelectric precision displacement stage.

Keywords：Piezoelectric platform；Terminal sliding mode controller； Tracking control

压电精密位移台是一种以压电致动器为核心驱动单元的高精度微纳米位移台。（剩余13460字）