光谱共焦传感器光轴与被测平板间垂直度误差校准方法

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中图分类号：TB9;TQ420.5 文献标志码：A 文章编号：1674-5124（2025）06-0081-08

Calibration method for verticality error between the optical axis of a spectral confocal sensor and the measured flat plate

PENG Qiuran， WU Yunquan， ZHOU Peng， LU Wenlong （School of Mechanical Science and Engineering， Huazhong University of Science and Technology，Wuhan 430074， China）

Abstract： In the thickness measurement of non - transparent flat plates based on bidirectional reflection of spectral confocal sensors，the verticality error betweenthe optical axis of the confocal sensor and the measured flat plate has a significant impact on the accuracy of the measurement results. In the existing calibration methods for the verticality error between the optical axis of the confocal sensor and the measured flat plate，due to the coupling relationship between relative tilt angle and distance，it is necessary to slowly and slightly adjust the mechanism to gradually approach the required wavelength，and then compare the light intensity.This results in low experimental eficiency and significant difficulty and complexity in operation. Therefore， a new method for calibrating the verticality error between the optical axis of the spectral confocal sensor and the measured flat plate is proposed， which can avoid this problem and quickly find the optimal verticality position. The measurement results of the standard sample block indicated that the measurement error of this method for different samples is within 1μm .And the experimental efficiency is improved by 55% ，and it is of great significance for the spectral confocal bidirectional counter reflection film thickness measurement system. Keywords：spectral confocal； thickness measurement; bidirectional opposition; verticality calibration; precision measurement

0 引言

光谱共焦测量是一种高精度、高灵敏性，集便捷和轻量化于一体的位移测量技术，广泛运用于机械制造[1-2]、生命科学[3-4]、电子制造[5-6]、化学化工[7]材料学[8]等诸多领域。（剩余9171字）