面向微小气体流量的临界流喷嘴校准方法实验研究

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中图分类号：TB9 文献标志码：A 文章编号：1674-5124(2025)06-0075-06

Experimental investigation on critical flow nozzle calibration method for micro gas flow

ZHU Xiaoyi， GAO Shan， CAO Peng, CUI Lishui (National Institute ofMetrology,Beijing 10o029, China)

Abstract: The critical flow nozzle is widely used in the gas flow measurement due to its simple structure, no movable parts,stableperformance,high accuracy and other advantages.It is used as a reference meter to transfer the quantity value to other flowmeters. The micro-critical flow nozle has unique advantages in the micro-gas flow metrology with increasing social demand. However,due to the lack of traceability methods for micro-critical flow nozles,the traceability of micro-critical flow nozzles cannot be effectively guaranteed. This paper proposes a calibration method of micro-critical flow nozzle based on the piston prover gas flow standard facility and evaluates the uncertainty of the calibration results.Four micro-critical flow nozzles are selectedasthe transfer standardsandare calibrated basedon the piston prover facilityand thepVTt facility. The consistency of the calibration results verifies the reliability of the critical flow nozzle calibration method based on the piston prover gas flow standard facility.

Keywords: micro gas flow; critical flow nozzle; calibration method; piston prover gas flow standard facility; uncertainty

0 引言

近年来，伴随航空航天、半导体芯片、生物医药、精细化工和环境监测等国家重点领域的快速发展，各领域对高准确度水平的微小气体流量计的需求显著增多，微小气体流量计的量值传递及溯源问题也日渐凸显[1-5]。（剩余10944字）