TFT基板创新遮光维修及参数优化分析

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关键词：TFT基板；暗点化维修；物理遮光；红外加热；响应面法 中图分类号：TN141.9；TP391.4 文献标识码：A doi：10.37188/CJLCD.2025-0147 CSTR：32172.14.CJLCD.2025-0147

Innovative shading maintenance and parameter optimization analysisof TFT substrate

TAN Siyun，HE Bin，HU Yanyu， JIANG Tengteng， ZHANG Xiaosong，LI Dengtao，LIU Haoran （HefeiBOEDisplay Technology Co.Ltd.，Hefei 2300l2，China）

Abstract： In order to solve the issue of certain specific bright spot defects on TFT substrates，which occur at a rate of approximately 0.23% and cannot be repaired，a method of coating bright spot pixels with UV curable black shading material is proposed.This method can be used to repair allbright spot defects，and the ability to repair the substrate by darkening the pixels is fully enhanced. Firstly，a series of experiments including lighting detection，microscopic observation，and focused ion beam （FIB） analysis were conducted toverify the feasibility of light shielding material coating bright spot pixels to achieve pixel darkening. Then，through experimental exploration，it was found that the important control parameters for achieving pixel dimming are shading rate and coating height.The effctsof thre factors，infrared intensity， infrared exposure time and discharge pressure，on shading rate and coating height were investigated. Finally，the response surface method was introduced to construct a response prediction model corresponding to shading rate and coating height，which was validated with experimental data. The optimal process parameters of three factors were analyzed to be 87.9% ， 2488ms ，and 0.0158MPa . According to the experimental results，the success rate of repairing bright spot defects on TFT substrates caused by different factors is 98% in the mass production.

Key words： TFT substrate；darkening point maintenance； physical shading； infrared heating；responsesurface method

1引言

随着液晶显示行业的发展及制造工艺的不断完善，人们对显示屏的追求也不断上升，这也带动了出货标准的不断提高，间接地对制造及维修工艺要求也不断加强。（剩余8900字）