高纯电子化学品先进制造的研究进展与产教融合趋势

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中图分类号：TQ426 文献标志码：A DOI：10.3969/j.issn.1003-9015.2025.00.037

Abstract：High-purity electronic chemicals are specialized insemiconductors，flat-panel displays，photovoltaics andother advanced industries.It raises high requirements on both high purity and high quality，yet encounters the lowlocalizationrates in China.This review uncovers the kinds，functions，preparationandqualityrequirements of electronic chemicals，such as electronic gas，wet electronic chemicals，photoresist，and highlights the content requirementsof purityand trace impurities of critical electronic chemicals.Moreover，this review provides the analysisof industrial scale，competitive landscape，and industrybariers of lectronicchemicals indomesticand international markets.It summarizes theresearch progress of separation technologies（e.g.subboiling distilation，reactive distilltion，adsorptive separation，membrane separation）in preparing high-purity electronic chemicals.Furthermore，ithighlights thechallngesof trace impurities removal in electronicchemicals，and provides thesystematic discusions about the mechanisms and advantages/disadvantages of various separation technologies，and the structure-property relationship between separation materials（e.g.adsorption，membrane）and metal ion removal performance.Inresponse todomesticproduction of electronic chemicals，thereviewconcludes thecritical technological challenges that are yet to be addressed in the purification and advance manufacture of electronic chemicals，as wellasthe importanceofintegrated developmentof education，scienceand technology，andtalentsinboostingthe

development of electronic chemicals.

Key Words：electronic chemicals；separation and purification；electronic gas；wet electronic chemicals; photoresist

1前言

电子化学品，又称电子化工材料，特指电子工业所使用的专用化学品和化工材料，被广泛应用于半导体制造、平板显示、光伏及印制电路板等领域，是电子信息产业的核心支撑材料。（剩余33399字）