接近式步进全息干涉拼接曝光实现的大口径液晶偏振光栅制备

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Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure

WANG Chen1， FANG Qipengl#， JIANG Feiyu 1，2 ，LIAO Chengkai 1，2 ， SUN Xiuhui'，HU Chao1，YIN Shaoyun1*

（1. Chongqing Institute of Green and Intelligent Technology，Chinese Academy of Sciences， Chongqing 400714， China; 2.School ofElectronic Science and Engineering，Chongqing University of Posts and Telecommunications，Chongqing 4Ooo65，China）

Abstract： Large-aperture liquid crystal polarization gratings （LCPGs） hold broad potential applications in beam steering modules due to their advantages of high eficiency and inertia-free operation. However， limited by the aperture of optical components in polarization holographic interference exposure systems，it is challenging to fabricate LCPGs with apertures exceeding 2 in （ 1in=2.54cm ） through single exposure.

This paper proposes a proximity stepper holographic interference splicing exposure method.By employing a photomask placed in close proximity to the exposure substrate，precise control of single-exposure area positioning is achieved combined with a high-precision displacement stage. Stepper splicing exposure of a 150mm aperture LCPG is realized. The fabricated grating exhibits a splicing seam of only 26.4μm and achieves a diffraction efficiency of 96.86% . This paper provides a new idea for the efficient deflection of large-aperture beams.

Key words： liquid crystal polarization gratings； holographic interference exposure；photoalignment； liquidcrystal polymer

1引言

光束的精确指向偏转被广泛用于显示系统、激光雷达、自由空间光通信以及激光微纳加工等领域[1-2]。（剩余8561字）