三自由度并联压电粘滑运动平台
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Three-degree-of-freedom parallel piezoelectric stick-slip platform
MENG Lingwei1，YANG Yilingl*，WUGaohua 2 ，CUI Yuguo¹，WEIYanding
（1.Ningbo Key Laboratory ofMicro-nano Motion and Intelligent Control， Faculty of Mechanical Engineering and Mechanics， Ningbo University， Ningbo 315211， China; 2.School ofEngineering，Huzhou University，Huzhou 313oOO，China; 3. Key Laboratory of Aduanced Manufacturing Technology of Zhejiang Province， School ofMechanical Engineering，Zhejiang University，Hangzhou 3lOo27，China） * Corresponding author， E -mail： yangyiling@nbu. edu. cn
Abstract： In addressing the performance requirements associated with macro-stroke applications，such as high precision，substantial load capacity，and multi-degree-of-freedom functionality for tasks involving cell puncture，micro-operation，and micro-assembly，a novel three-degree-of-freedom parallel stick-slip driving platform utilizing piezoelectric compliant mechanisms was proposed. The integration of macro fiber composite with the arch driving mechanism constructed a driving unit that facilitates stick-slip actuation， enabling large-scale，high-precision motion of the parallel platform.Furthermore，the implementation of cylindrical support significantly enhanced the platform's load capacity，while universal bearings mitigate non-driven friction，thereby improving overall motion performance. The finite element method was utilized to establish the static model of the compliant arch driving unit，followed by simulations and analysis of output displacement and natural frequency. An experimental test system was subsequently developed to validate the output performance of the platform. Experimental results indicate that the piezoelectric stickslip platform，operating in stepping mode，achieves maximum single-step translation displacements of （204号 294.7μm and 304.5μm along the X and Y axes，respectively，as well as a maximum single-step rotation angle of 9.96 mrad around the Z axis，with a maximum vertical load capacity of 110N .In scanning mode，the displacement resolutions for translation and rotation are recorded at 6nm and ，respectively.Thus，the designed parallel piezoelectric stick-slip platform efectively satisfies the performance criteria required for precision micromanipulation tasks.
Key words： piezoelectric actuation；compliant mechanism； stick-slip motion; three degrees of freedom
1引言
目前，高精度运动平台广泛应用在生物医疗[1-2]、光学制造[3以及微纳操作[4]等技术领域。（剩余11461字）