真空吸附装夹对镜片面形调控的影响

打开文本图片集

Influence of vacuum adsorption mounting on adjustment of lens surface shape

（1. Center for Aduanced Jet Engineering Technologies （CaJET）， School ofMechanical Engineering， Shandong University，Jinan 25O061，Chain;

2. Key Laboratory of High Efciency and Clean Mechanical Manufacture of the Ministry ofEducation， Jinan 250061，Chain;

3.GoerTek Inc.，Weifang 26l06l，Chain） * Corresponding author， E-mail：yaopeng@sdu. edu. cn

Abstract：Vacuum adsorption clamping ensures a uniform distribution of force on the lens，mitigates the occurrence of surface scratches，and is widely utilized in the processing and assembly of optical machine systems.This study examines the impact of vacuum adsorption on the surface morphology of thin plane lenses.Initially，the theory of circumferentially simply supported flat plate deformation，in conjunction with thin plate theory，is applied to analyze how various contact states between the lens and fixture，as wellas difering vacuum levels，influence lens deformation. Subsequently，a fluid-solid coupling model is established to investigate the efects of various negative pressure conditions on lens surface geometry， thereby validating the feasibility of employing vacuum adsorption to regulate lens shape. Finally，adsorption clamping experiments are conducted to assess changes in lens morphology before and after vacuum application. The findings reveal a reduction in the error of the lens adsorption surface shape from to7 （20 μm ，while the gap between the lens and fixture decreased from 9μm to 4μm ，reaching a minimum of 0.8 μm . In conclusion，negative pressure adsorption enhances the conformity of the lens adsorption surface to thefixture surface，thereby substantiating the eficacy of vacuum adsorption as a method for regulating lens surface shape. The proposed vacuum adsorption clamping technique not only improves the precision of lens processing and assembly but also effectively minimizes the impact of initial surface shape erors on the optical system.

Key words： vacuum adsorption； plane lens；adsorption hole fixture； clamping deformation； surfaceshape regulation

1引言

随着精密加工技术、光学技术的飞速发展，光机系统广泛应用于航空航天、医疗器械、光学显微镜和安防监控等领域[]。（剩余12060字）