射频轴快流 CO2 激光器动态L型阻抗匹配网络设计
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中图分类号：TN248.2 文献标志码：A doi： 10.37188/CO.2024-0096 CSTR：32171.14.CO.2024-0096
Design of dynamic L-type impedance matching network in RF excited fast axial flow CO2 lasers
HUANG Pan 1，2 ， ZHAO Chong-xiao1*，DONG Zhu-jun12， ZHAO Zhen³， PAN Qi-kun ！1 FENG Yu-ze1，ZHANGLai-ming1，GUO Jin1 （1. Changchun Institute of Optics，Fine Mechanics and Physics， Chinese Academy of Sciences， Changchun 13o033， China; 2. University of Chinese Academy of Sciences， Beijing 10oo49， China; 3.Air Force Equipment of the Military Representative Office in Changchun， Changchun 130102，China） * Corresponding author， E -mail： zhaochongxiao@ciomp.ac.cn
Abstract： In order to solve the problem of RF discharge impedance matching of high-power fast axial flow CO2 lasers， an impedance matching network with low reflectivity and high dynamic matching range was designed to realize the efficient utilization of RF excited fast axial flow CO2 lasersunder different discharge structures.Based on the impedance matching theory of RFcircuits，a multi-electrode equivalent circuit model was constructed，a method of introducing tunable high-voltage ceramic capacitors into the matching network was proposed，and a dynamic L-type matching network suitable for high-power RF excited fast axial flow CO2 lasers was designed. The simulated dynamic L-type matching network can inject 60kW RF power into 16 discharge tubes and achieve a reflectivity of less than 1% in the range of total load impedance of . A single-tube RF discharge experimental device was built， and the reflectivity of the dynamic L-type matching network was measured as less than 1% at 4kW injection power， which was consistent with the simulation results. It is proved that the dynamic L-type matching network with adjustable high-voltage ceramic capacitors can achieve impedance matching in the high dynamic range， which meets the design requirements of high-power RF excited fast axial flow CO2 laser matching circuits.
Key words： fast axial flow CO2 laser; RF excitation; impedance matching;L-type dynamic matching
1引言
射频激励轴快流 CO2 激光器除广泛应用于激光切割、焊接等领域外，由于其激发的锡等离子体在极紫外（ExtremeUltraviolet，EUV）波段具有高光光转换效率的优势，也成为LPP-EUV（LaserProducedPlasma-ExtremeUltraviolet）光源中驱动激光器的重要组件。（剩余10810字）
