利用级联超构表面同时测量径向角位移和纵向线位移
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中图分类号：TP394.1;TH691.9 文献标志码：A doi：10.37188/CO.2025-0033 CSTR：32171.14.CO.2025-0033
Simultaneous measurement of radial angular displacement and longitudinal linear displacement with cascade metasurfaces
ZHANG Zhen-yu12， ZHANG Wei'， LIU Rui12， ZHANG Jing-ying1²2， LI Wen-hao1 * （1. Changchun Institute of Optics，Fine Mechanics and Physics， Chinese Academy of Sciences， Changchun 130033， China; 2.University of Chinese Academy of Sciences，Beijing 10oo49， China） * Corresponding author，E-mail： liwh@ciomp.ac.cn
Abstract： To solve the problem of existing metasurface displacement measurement techniques unable to measure multiple physical quantities simultaneously， this paper proposes a metasurface cascade structure that can measure radial angular displacement and longitudinal linear displacement simultaneously. First， the working principle of displacement measurement is described according to the joint phase modulation of circular polarized light by a cascade metasurface. Secondly，the displacement information carried by the phase delay is analyzed using the Jones transport matrix，and the angular and linear displacements are mathematically characterized. Then， the design objective is used as a constraint to optimizeunit structure parameters and create metasurface models.Finally，the finite-difference time-domain method is used to simulate the metasurface structures，validate the method's feasibility，and evaluate the device's measurement performance.The results show that the angular displacement sensitivity is 0.9716 with a theoretical resolution of 34.27 μrad， and the linear displacement sensitivity is 0.0041 with a theoretical resolution of 8.12nm at the working wavelength of 633nm . The measurement freedom of metasurface displacement measurement technology is improved by this method. It is hoped to be further expanded to six dimensions so that the measured target's entire attitude can be determined.
Key words： metasurface； angular displacement; linear displacement; displacement measurement; multiple physical quantities
1引言
光学测量方法具有精度高、非接触、测速快等优点，广泛应用于机械制造、量子物理、半导体工业、航空航天等领域[1-4]。（剩余14296字）
