腔衰荡光谱仪器腔镜微缺陷散射模型

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中图分类号：0433.1 文献标志码：A doi：10.37188/CO.2024-0094 CSTR：32171.14.CO.2024-0094

Scattering model for micro-defects on cavity mirrors in cavity ring-down spectroscopy instruments

REN Yi-jie 1，2，3 ，ZHANG Zheng-tao 1，2，3 （20号 （1. CASI Vision Technology Company，LTD，Luoyang 4710o0， China;

2. Institute of Automation， Chinese Academy of Sciences， Beijing 10o190， China;

3.Luoyang Institute for Robot and Intelligent Equipment，Luoyang 471oo0， China） *Corresponding author，E-mail：yijie.ren@ia.ac.cn

Abstract： Microdefects in cavity mirrors utilized in cavity ring-down spectroscopy （CRDS） instruments adversely affect measurement accuracy.Aiming at this problem，this paper establishes a scattering model for micro-defect on cavity mirrors based on the Bobbert and Vlieger Bidirectional Reflectance Distribution Function （BRDF） theory to analyze the characteristics of scatered light of microdefects under varying wavelengths， incident angles， defect sizes， defect types， defect densities，and substrate coatings. Studying on the cavity mirror microdefect scattering model shows that defects in the micrometer to submicron range （ 100μm to affect the ring-down absorption accuracy.Forthe detection of micro-defectsat this scale，analytical models for both cavity mirror micro-defect scattering and micro-defect dark-field detection is established. Establishing and analyzing the scattering light model for micro-defects in CRDS （Cavity Ring-Down Spectroscopy）cavity mirrors is critical to realizing the high-precision detection of microdefects on CRDS mirror

and recovering CRDS measurement accuracy.

Key Words： cavity ring-down spectroscopy; micro-defect of cavity mirror; CRDS accuracy; BRDF; microdefect scattering model

1引言

腔衰荡光谱技术（CRDS）凭借高光谱分辨率（kHz）、快速（us）、高精度（ppb）、便携等优势，被广泛应用于痕量气体检测、环境监测、分子光谱研究、医疗诊断等各个领域[1。（剩余16704字）