生物荧光系统中多通道负滤光膜的研制

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中图分类号：0484 文献标志码：A doi： 10.37188/CO.2024-0144 CSTR：32171.14.CO.2024-0144

Development of multi-channel negative filter film in bioluminescence system

QI Hao-di1²，FU Xiu-hua 1，2 *，PAN Yong-gang²*， SHI Peng³， WANG Ben²，LIN Zhao-wen²， DONG Suo-tao²， ZHAO Bao-liang12，LI Shuang4

（1.School of Optoelectronic Engineering， Changchun University of Science and Technology， Changchun 130022， China; 2. Zhongshan Institute of Changchun University ofScience and Technology，Zhongshan 528436，China; 3. Zhongshan Torch Polytechnic， Zhongshan 528436， China; 4. OPTORUN， Shanghai Co.， Ltd.， Shanghai 200444， China） * Corresponding author， E-mail： goptics@126.com; 18222671133@163.com

Abstract： With the rapid development ofbioluminescence technology，the demand for high-precision signal transmission has increased significantly.As the filter film is the core component of the system，the spectral characteristic of the filter film directly affects the accuracy of signal transmission. In this study， Nb2O5 and SiO2 were selected as high and low refractive index materials，respectively.A multi-channel negative filter was optimized using the Gaussian apodization function and Optilayer software.The filter film was deposited on a D263T substrate using an inductively coupled magnetron sputering technique. The effect of thickness control errors on spectral shift and passband transmittance was addressed through inverse film sensitivity analysis.The effect of process parameters on film roughness was investigated，and it was found that adjusting the inductively coupled plasma （ICP） power could efectively improve film roughness.When the developed multi-channel negative filterwas testedat a 45∘ angleof incidence，thereflectance half-bandwidths of the center wavelengths of 576nm ， 639nm ，and 690nm were 5nm ， 6nm and 7nm ，respectively， with an average reflectance of about 98% . The average transmittance in the transmission ranges of 545-562nm ， （204号 597-624nm ，655-675 nm， and 708-755nm was 92% . The multi-channel negative filter successfully passed both the environmental resistance test and the spectral stability test， thus meeting the application requirementsof the multi-channel negative filter in the bioluminescence system.

Key words： bioluminescence system; multi-channel negative filter film; error of film thickness; roughness

1引言

滤光膜因具有高效、快速的分光特性，被广泛应用于光学扫描系统、接收光学系统、红外探测器组件、信息处理器等[1]。（剩余14140字）