FMCS系统在FAB厂房中的应用

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[摘    要]结合芯片制造的主要工艺流程和FAB厂房的特点，主要介绍了厂务监控系统FMCS系统的结构及优点，并就FMCS系统在FAB厂房的应用给出工程实例，为进行FAB厂房自动化控制规划提供了新方案。

[关键词]FAB;FMCS;自动化

[中图分类号]TN05 [文献标志码]A [文章编号]2095–6487（2022）07–000–04

Application of FMCS System in FAB Plant

Shi Gui-chun

[Abstract]Combined with the main process flow of chip manufacturing and the characteristics of Fab plant， this paper mainly introduces the structure and advantages of FMCS system， and gives an engineering example of the application of FMCS system in fab plant， which provides a new scheme for engineers and technicians in the automatic control planning of Fab plant.

[Keywords]FAB; FMCS; automation

FAB厂房通常又称晶圆厂房，而芯片制造是在FAB厂房中利用硅晶圆作为低衬，并在硅晶圆上进行电路设计制造，最终成为芯片的一个过程。（剩余4606字）