DUV波段高消光比的反常偏振光栅研究

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中图分类号：TN253文献标志码：A

Abstract： Utilizing the anomalous polarization effect resonant domain gratings，in this paper， we developed a metallic gratingwith fused silica （SiO2） ）as the substrate aluminum （Al） as the metal the grating lines. The grating demonstrates unusual polarization properties transmitted TE-polarized light reflected TM-polarized light，with a period 261nm ，nearthe incident wavelength 266nm . When the light source is vertically incident to the grating， the transmittance TE polarized light can achieve 82% ， the extinction ratio canreach 22o.In order to further improve the extinction ratio the grating， in this paper， a layer medium is added on the SiO2 substrate， Al2O3 Si3N4 are selected as the medium layer materials. Analysis the simulation results indicates that when Al2O3 is employed as the dielectric layer material， the grating's extinction ratio reaches 24o. When Si3N4 isused， the extinction ratio rises to 396. Additionally， the transmittance TE-polarized light consistently exceeds 60% .Theanomalously polarized grating has a wide range potential applications in photolithography polarization systems，optical filtering， other fields.

Keywords： deep ultraviolet region; resonant domain gratings; anomalous polarization effect; grating polarization devices; extinction ratio

自光栅的双折射特性被发现以来，这一特性在光学领域引起了广泛关注，并成功应用于多种重要偏振器件的开发，如线栅偏振器[、偏振分束器[2]和径向偏振器[]等。（剩余10236字）