机械臂辅助的微小光电传感组件精密装配方法

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关键词：精密装配；机械臂；视觉测量；微夹持器

中图分类号：TP394.1;TH691.9 文献标识码：A

doi：10.37188/OPE.20253316.2592 CSTR：32169.14.OPE.20253316.2592

Precision assembly method for tiny optoelectronic components assistedwithroboticarm

WANG Xiaodong，YAN Zhiyu，HOU Ruiyang，WANG Sizhi， XIAO Sien，XU Zheng （School ofMechanical Engineering，Dalian University of Technology，Dalian 116O24，China） * Corresponding author， E -mail： xuzheng@dlut. edu.cn

Abstract： Tiny optoelectronic components serve as the core elements in some high-performance sensors， where their assembly precision critically determines device performance.To address limitations in current assembly methods，such as complex configurations， high costs，and poor scalability，herein the research on the precision assembly method of tiny optoelectronic sensing components were performed. The primary contributions of this work are summarized as folows：First，a miniaturized parallel adsorption device and a robotic manipulator-assisted precision assembly system were developed. Second，considering the dual requirements of eficiency and accuracy，a two-step visual alignment method was established. This method combines "state frezing" with "marker-guided" referencing to determine the spatial relationship between co ordinate systems. Finally，the assembly experiments involving miniature optoelectronic components were conducted using the developed system to validate the proposed method. Experimental results show that， by applying the robotic arm-assisted assembly method herein proposed，the assembly accuracy can be improved to the 10μm level. This breaks through the limitation of the robotic arm's own repeat positioning accuracy，enabling the system to balance eficiency and precision while significantly reducing the complexity and cost of the equipment. We believe that it can be widely applied to various precision operations. Key words： precision assembly；robotic arm；visual measurement；micro-gripper

1引言

微小光电组件是一些高性能传感系统的核心，具有结构紧凑、经济性好、灵敏度高、不受电磁干扰等特点[1-3]，因其在性能方面的显著优势，需保证其装配精度，以满足实际需要。（剩余11625字）