谐波减速器集成式薄膜温度传感器设计与测试

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Design and testing of thin-film temperature sensors integrated on harmonic reducer

CAO Jiajun，SHEN Wenqiang，WANG Xiaodong，YANG Jinyi，LOU Zhifeng （School ofMechanical Engineering，Dalian University of Technology，Dalian l16023，China） * Corresponding author， E -mail： louzf@dlut. edu. cn

Abstract：Real-time acquisition and monitoring of temperature data during the operation of harmonic reducers are crucial fortimely fault diagnosis and performance optimization.This study presents an in situintegrated film temperature sensor within the harmonic reducer. To minimize the impact of flexspline strain on the accuracy of temperature measurements， finite element analysis was employed to characterize the strain distribution under various operating conditions. Subsequently，the sensor's structural design was optimized to mitigate strain-induced measurement interference.Utilizing MEMS technology，the film temperature sensor was fabricated，with strain effects compensated to enhance measurement precision. Evaluation results demonstrate a static temperature measurement accuracy of ±0.3% ，an accuracy of （204号 ±0.047% during wave generator rotation， ±0.23% at ，and ±0.52% at . Furthermore，repeatability tests conducted between 20∘C and 120∘C yielded standard deviations relative to a reference temperature sensor ranging from to ，confirming reliable real-time temperature acquisition. These findings indicate that the developed film temperature sensor can accurately monitor the operating temperature of harmonic reducers，providing a valuable tool for improved diagnostic and optimization processes.

Key words： temperature sensor； harmonic reducer；finite element analysis； integrated sensor

1引言

协作机器人是一种新型的工业机器人，具有轻量灵活、安全智能等特点，可以与人类在同一空间有效地协同工作，在未来的工业制造、医疗手术、家庭服务等领域均有着广阔的前景[1-2]。（剩余11499字）