全息曝光干涉条纹相位锁定系统设计

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Design of holographic exposure interference fringephase locking system

Abstract： To fabricate high-quality holographic gratings and improve the fringe stability of the beam-splitting amplitude exposure system，this study analyzes the effects of different beam-splitting devices on fringe stability and designs a phase-locking system for holographic grating interference fringes.First，based on the principles of interference exposure and the impact offringe drift on exposure contrast，we analyzed the directional requirements for light sources when using diferent beam-spliting components. A detection method for interference fringe variations，utilizing Moiré fringes from areference grating，was investigated. Suitable detectors and actuators were selected，and a closed-loop fringe phase-locking system was designed and implemented using an STM32 microcontroller integrated with a PID algorithm. Experimental results demonstrate that the locking system achieves a control frequency of 1kHz ， effectively suppressing low-frequency drift primarily within 0～3Hz . After stabilization，the root mean square（RMS）value of fringe drift was reduced to 0.0047λ . When laser pointing stability is insufficient，the proposed gratingbased beam spliting combined with single-point phase locking can meet the fringe stability requirements for large-scale holographic grating fabrication.

Key words： holographic grating； phase locking；Moiré fringe；closed loop control

1引言

全息光栅在调频脉冲压缩1-2、精密位移测量[3-4]和光谱仪[5-6]等领域有着广泛的应用。（剩余12723字）