四质量高频三轴MEMS陀螺设计及制造

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Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope

WEI Wenqiang1，TIANHuimin¹，CAIQi1，CUIRang1，LI Haoran 1 ， CAO Huiliang²

（1. School of Instrument and Electronics，North University ofChina， Taiyuan O3oo51， China; 2. School of Integrated Circuits and Electronics，Beijing Institute of Technology，Beijing，1Ooo81，China） *Correspondingauthor， E -mail：caohuiliangl986@126.com

Abstract： To address the limited interference resistance and large size of conventional monolithic triaxial gyroscopes，a novel quad-mass high-frequency triaxial MEMS gyroscope was presented. Compared with traditional gyroscopes，this device had a relatively higher resonance frequency （ ～30kHz ），and the size of the sensitive structure was only 3mm×2.56mm .This paper described the sensitive structural form and working principle of the designed gyroscope. Moreover，the width of the beams of the sensitive structure was optimized through a multi-objective genetic algorithm to make the resonance frequency of the working mode higher than 30kHz and the frequency difference between the drive mode and the sense mode less than 200Hz . It was fabricated using a three-wafer bonding technology and characterized by a swept-frequency testing system. The experimental results show that the resonance frequencies and quality factors of its drive mode， X -axis， Y -axis，and Z -axis sense mode are 29 692Hz and 1 274，3 1 290Hz and 354， 29881Hz and 305，3O 721 Hz and 393，respectively. The results verify the correctness of the design and research methods，and provide a feasible solution for the development of high-frequency triaxial MEMS gyroscopes.

Key words： MEMS gyroscope;monolithic triaxial; high-frequency； multi-objective optimization

1引言

微机械陀螺被广泛应用于组合导航系统、飞行器制导与控制、汽车安全与导航、机器人及医疗仪器等领域[1-5]，具有体积小、成本低、可靠性高、易于集成等特点[6-9]。（剩余15477字）