基于空间约束的差动共焦离轴非球面自适应测量方法

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Adaptive measurement of off-axis aspheric surfaces of differential confocal based on spatial constraints

MAWeikuo，QIULirong，LIYihao，ZHAO Weiqian，LIUYuhan （MIIT Key Laboratory of Complex-field Intelligent Exploration，School ofOptics and Photonics， BeijingInstituteofTechnology，BeijinglOOO8l，China） * Corresponding author，E-mail： 2449664655@qq. com

Abstract：The asymmetrical shape of the of-axis aspheric surface and the nonlinear change of its surface curvature bring challenges to the high-precision measurement of surface shape.In order to solve the problem that existing off-axis aspheric surface shape measurement methods were highly dependent on precise initial alignment of the test piece and showed poor adaptability to curvature variations，we proposed a spatially-constrained diferential confocal adaptive measurement method to achieve adaptive and high-precision measurement of off-axis aspheric surfaces without initial pose dependence. First，based on the translationrotation scanning measurement principle and the demonstrated performance of diferential confocal technology in anti-surface inclination accurate fixed focusing，we developed a spatial constraint model incorporating both distance and tilt angle parameters between designed measurement points and actual test locations.

This model enabled optimized spiral scanning path planning with curvature-adaptive adjustment capability for off-axis aspheric surfaces.Experimental verification demonstrated surface form accuracy with root mean square （RMS） errors below 1O nanometers and 3σ values under 5 nanometers compared to Zygo interferometer references，meeting the requirements of high-precision measurement of off-axis aspheric surfaces.

Key words： spatial constraints； diffrential confocal； of-axis aspherical； adaptive measurement； pathplanning

1引言

在光学系统中，离轴非球面的应用能够减小系统体积、减轻系统重量、有效校正像差、扩展视场角度，提升成像质量[1-3]，广泛应用于航空航天、光学检测、激光加工等领域[46]。（剩余12752字）