基于主动惯量补偿的高性能压电旋转驱动器

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关键词：主动惯量补偿；粘滑运动；小惯量动子；回退抑制；旋转驱动器中图分类号：TP394.1;TH691.9 文献标识码：Adoi：10.37188/OPE.20253310.1571 CSTR：32169.14.OPE.20253310.1571

High performance piezoelectric rotary actuator based on active inertia compensation

YU Haiyang 1，2 ， YAN Peng 1，2* ，MENG Lingchen 1，2

（1.School ofMechanical Engineering，Shandong University，Jinan 25Oo61，China; 2. Key Laboratory of High-efficiency and Clean Mechanical Manufacture of the Ministry of Education，Jinan 250061，China） * Corresponding author，E-mail： yanpeng@sdu. edu. cn

Abstract： A novel piezoelectric rotary actuator incorporating active inertia compensation was developed to suppress the significant backward motion inherent in smal-inertia rotors，thereby achieving eficient and stable stick-slip motion.By implementing active inertia compensation and optimizing the timing of the driving voltage，the backward motion was effectively suppressed，leading to enhanced speed and smoothness of motion. The working principle of the actuator，based on the active inertia compensation method，was thoroughly analyzed.Structural analysis and simulations were conducted，and the theoretical feasibility of the active inertia compensation method was validated by comparing its efects with and without compensation.An experimental system for driving the smal-inertia rotor was established，and comprehensive tests were performed to evaluate its output performance. Experimental results indicate that 79.77% of the rotor's backward angle can be suppressed using active inertia compensation. The minimum resolution of the piezoelectric rotary actuator with active inertia compensation is 1.12μrad ，and the maximum speed reaches 813.85 mrad/s. This method enables the high-efficiency and stable stick-slip motion of small-inertia ro tor，thereby achieving high-performance output for piezoelectric rotary actuator.This has significant application potential in ultra-precision operations within complex workspaces，such as micro and nano-scale manipulations.

Key words： active inertia compensation；stick-slip motion； smal-inertia rotor; backward motion suppression；rotaryactuator

1引言

压电驱动器以响应速度快、抗干扰能力强、稳定性高、结构紧凑等显著优势，在超精密仪器、材料科学、生物医学、航空航天等领域[1-3]广受青睐。（剩余14153字）