基于干涉条纹区域生长算法的平板玻璃平行度测量

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关键词：平板玻璃；平行度；区域生长；干涉测量

中图分类号：TH712 文献标识码：A

doi：10.37188/0PE.20253310.1515 CSTR：32169.14.OPE.20253310.1515

Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm

WANG Mingjun1， HUANG Yifan 1，3 ，LIU Shijie Z* ，LI Liangwei 1，3 ，LI Pengbo 1，3 ，LI Junda 1，3 WU Fulin³， XU Xueke³， SHAO Zhufeng4

（1. School of Automation and Information Engineering， Xi'an University of Technology， Xi'an 710048， China; 2.Precision Optical Manufacturing and Testing Center，Shanghai Institute of Optics Fine Machanics， Chinese Academy of Sciences， Shanghai 2O18oO， China; 3.Hengmai Optical Precision Machinery （Hangzhou） Co. Ltd， Hangzhou 311421， China; 4. China Academy ofBuilding Materials Science，Beijing1Ooo24，China） * Corresponding author， E -mail： shijieliu@siom. ac. cn

Abstract： In order to achieve high-precision and fast measurement of paralelism of flat glass，a new measurement method using an area growth algorithm to segment the interference fringe map was proposed. A Fischer interferometer was used to collct the self-interference fringes generated by reflections from the front and back surfaces of the flat glass，and an area growth algorithm was used to segment the collcted self-interference fringes，extract the self-interference fringes，and statistically count the number of interfer ing fringes within the measurement aperture，so as to realize the measurement of the degree of paralelism. After comparing the region growing algorithm with the Sobel algorithm，it was found that the region growing algorithm performed better in the extraction of interference fringes.Measurements of diffrent types of interference fringes using this algorithm and comparisons of the measurement results with those of ZYGO showed that the error of parallelism measurement based on the region growing algorithm was less than 1′′ Using this interferometric method of image processing，the parallelism offlat glass can be measured easily and quickly，which improves the inspection efficiency offlat glass，and at the same time hasa high measurement accuracy.

Key words： plate glass;parallelism; region growing；interference measurement

1引言

在光学和电子设备的制造中，常常会用到由两个平面构成的玻璃平行平板或相当于平行平板的光学零件，而这类光学零件对平行度有较高的要求[14]。（剩余10580字）