大量程平面二维时栅误差特性与实验研究

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中图分类号：TH7 文献标识码：Aoi：10.37188/OPE.20253310.1558

Abstract：For the traditional planar two-dimensional grating displacement sensors conducting large-area planar displacement measurements，there were some problems such as complex structure and strict grid processing requirements. A two-dimensional displacement measuring method "dimension judgment + displacement decoupling" was proposed，which adopted a spatial periodic sensing structure to build the quadrature varying magnetic field mapping between the spatial two-dimensional displacements and time reference.The influences measuring accuracy on two-dimensional displacements caused by instalation errors the moving scale were studied. Through modeling simulation analysis and experimental verification，the measuring errors two-dimensional displacement caused by the roling atitude，the pitch attitude，and the yaw atitude were deeply analyzed.The experimental results show that installation errors mainly introduce DC set，2nd and 4th harmonic errors into the two-dimension displacement measurement. When the air gap height between the moving scale and the fixed scale is 0.6mm ，the measuring error in the X direction is not more than ±8.6μm ，the measuring error in the Y direction is not more than ±8.8μm ，and the resolution is 0.15μm within the 240mm×240n nm measuring range. The micrometerlevel two-dimensional displacement measurement is achieved with milimeter-level sensing units within the （204 240mm×240mm measuring range，which promises the significant academic value and engineering application value.

Key words： large measuring range； two-dimensional displacement measurement； time-grating sensors;error analysis

1引言

随着纳米数控机床、高端光刻机、天文观测等超精密加工装备和检测仪器的快速发展，都对数百毫米平面范围内的微米甚至亚微米级定位提出了迫切要求[1-3]。（剩余10884字）