改进相位相关与聚类思想的Micro-LED芯片 显微图像拼接

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Improved phase correlation and clustering ideas for Micro-LED chip microscopic image stitching

LIN Jianpu 1，2 ， WANG Tingyu 1，2 ， CAI Bipeng 1，2 ， ZHANG Jianhao 1，2 ，MEI Ting 2，3 LIN Shanling 1，2 ， LIN Zhixian 1，2，3 ，LE Jianbi 2* ， WU Chaoxing2，3

（1.School of Advanced Manufacturing，Fuzhou University，Quanzhou 362252，China; 2. China Fujian Photoelectric Information Science and Technology Innovation Laboratory， Fuzhou ，China; 3. School of Physics and Information Engineering，Fuzhou University，Fuzhou 35Ol16，China） * Corresponding author，E-mail： lejianbi@fjoel.cn

Abstract： Aiming at the problem of slow algorithmic stitching and low accuracy due to the existence of a large number of similar and neatly arranged LEDs in the existing microscopic images of Micro-LED chips， this paper proposed a clustering-based Micro-LED chip micro-image stitching method. Firstly，the OTSU method was used to preprocess the images，and then the adaptive area expansion phase corelation method was used to peak the overlapping regions of two adjacent images to obtain the ofset of the preliminary alignment. Subsequently，the optimized alignment strategy using image chunking and the DHash algorithm was employed to obtain the optimized ofset. Finally，density-based spatial clustering of applications with noise was introduced to automatically screen out and deal with the possible erroneous ofsets.The experimental results show that the average time consumption of this paper's algorithm is 64ms ，which meets the demand of real-time stitching，the stitching correct rate reaches 99.4% ，the alignment accuracy is controlld within 1 pixel，and the fusion processing can achieve a perfect stitching efect subjectively，which also provides a new solution to the overall misalignment problem caused by the wrong ofsets. The algorithm in this paper effectively solves the key link of microscopic image stitching in wafer-level Micro-LED chip inspection and can be promoted and applied to other machine vision automation fields with repetitive features and high precision requirements，with high practical engineering application value.

Key words： image stitching；Micro-LED chip micrographs；phase correlation； DHash；clustering idea; defect detection

1引言

Micro-LED被视为下一代显示技术的重要发展方向，具有高亮度、低功耗、响应速度快等优点。（剩余14865字）