基于球面光投影成像的直线位移测量系统

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中图分类号：TP212 文献标识码：Adoi：10.37188/OPE.20253304.0532

CSTR：32169.14.OPE.20253304.0532

Absolute linear displacement measurement system based on spherical light projection imaging

ZHAO Zhicai 1，2 ，YU Hail*，WAN Qiuhual，LIANG Lihui¹， ZHANG Hongxin 1 ， ZENG Qifengl （1. Changchun Institute ofOptics， Fine Mechanics and Physics ， Chinese Academy ofSciences， Changchun 130033，China. ; 2.Graduate University of Chinese Academy ofSciences，Beijing 1Ooo49，China.） * Corresponding author， E-mail： yuhai@ciomp. ac. cn

Abstract： Image-based displacement measurement using image recognition algorithms is a novel digital displacement measurement technology that offers high robustness and fault tolerance. To reduce the volume of the measurement system while achieving high-resolution linear displacement measurement，a linear displacement measurement system based on spherical light projection imaging was designed. Firstly，the magnification efect of spherical light projection was utilized to design the spherical light projection imaging magnification optical path，and the pixel grayscale values captured by the image sensor were compensated based on the optical wave plane model. Subsequently，to achieve absolute position measurement and encoding element discrimination on a single code track，a pseudo-random sequence encoding method and a decoding method based onwidth threshold were designed.Then，to achieve sub-pixel linear displacement measurement and enhance system accuracy，a linear displacement subdivision algorithm and a multi-centroid fusion algorithm were designed. Finally，an experimental setup was designed to experimentally validate the proposed method.The measurement optical path height of the designed experimental setup is only （204号 5mm . The experimental results indicate that the proposed method can achieve a theoretical resolution of 5 nm within a 250mm range，with an error range of -3.3μm to 3.6μm ，and after compensation，the error rangeisreduced to -0.6μm to 1μm . The research conducted can provide a technical basis forhigh-resolution linear displacement measurement studies while reducing the system volume and achieving high-resolution linear displacement measurement.

Key Words： spherical light projection imaging；image-based linear displacement measurement； high robustness；high fault tolerance；high resolution

1引言

随着我国工业化进程的提速，高端制造业的发展越来越受到重视[1]。（剩余13029字）