极紫外透射薄膜滤片研究进展

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中图分类号：O484文献标志码：A

Research progress of transmissive thin-film filters in the extreme ultraviolet ranges

LI Xiaoran，CHEN Jun，CHEN Yiwen（Laboratory of Thin FilmOptics，Shanghai Institute of Optics andFine Mechanics，Chinese Academyof Sciences，Shanghai201800，China）

Abstract： Transmissive thin-film filters are important optical elements in the extreme ultraviolet （EUV） bands， which have been widely used in many scientific and technological fields such as semiconductor manufacturing， synchrotron radiation， material analysis， space astronomical observation， etc. In this paper， we review the research progress of transmissive thin-film filters on their design， preparation process and performance， focusing on the mechanical strengths of the filters and their optical properties at different wavelengths，and analyze the effects of material choices and layer-stack parameters on their thermal stabilities. Furthermore， we also discuss the problems of pinhole defects and challnges of film contamination in engineering applications， aiming to promote the development of EUV transmissive filters in domestic research.

Keywords： extreme ultraviolet; transmissive; thin-film; filter; preparation process; performance

极紫外（extremeultraviolet，EUV）波段作为“短波光学”研究领域的重要组成部分，因其短波长的特性得到了广泛的应用。（剩余19664字）