高陡度宽透射二向色镜的研制

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中图分类号：O432文献标志码：A

Development of high-steepness and wide-transmission dichroic mirror

DONG Ming，LIU Bowen，BAI Haoyu，HUANG Hongyu，LIN Xiaomin， QIN Rui，LI Bing，CHEN Jing （ShenyangAcademy of Instrumentation Science Co.，Ltd.， Shenyang11Oo43， China）

Abstract： The dichroic mirror is a critical optical component in fluorescence detection systems.To meet the demands of high-end applications such as Raman spectroscopy and flow cytometry， a high-steepness wide-transmission dichroic mirror was designed and fabricated. This mirror utilized three thin-film coating materials， Nb2O5 ， Al2O3 and SiO2 ，and was characterized using a spectrometer （Cary 70o0） equipped with a universal measurement accessory （UMA）. The dichroic mirror achieved an average transmission Tavg⩾90% ，an average reflectance Ravg⩾98% and a steepness ⩽7nm （the transition zone between the 90% transmission edge and the 2% cut-off edge）. Its transmission band exceeded 300nm . Compared to dichroic mirrors designed with the same number of layers and thickness but using only two materials， the three-material design improved steepness by more than 3nm . The results demonstrate that the Nb2O5/Al2O3/SiO2 multilayer coating effectively optimized the optical performance， achieving ideal outcomes in film design， manufacturingprocesses， and spectralcharacteristics.

Keywords：optical thin film; dichroic mirror; high-steepness; wide-transmission; thin film material

二向色镜的发展历程与光学技术、材料科学以及精密制造技术的进步，尤其是薄膜技术和镀膜技术的发展紧密相关。（剩余8206字）