白光干涉测量系统计量特性的评价与校准

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中图分类号：TB92；TB133文献标志码：A

Evaluation and calibration of the measurement characteristics of white light interference systems

CAI Xiaoyu，WU Junjie，WEI Jiasi （Key Laboratory of Bioanalysis and Metrology for State Market Regulation， Shanghai Institute of Measurement and Testing Technology， Shanghai ， China）

Abstract： The measurement system based on the white light interference principle （such as white light interference microscope） has the technical advantages of sub-nanometer longitudinal resolution， non-contact， high efficiency of field scanning，etc.，and is often used to measure the surface morphology and structure of products on the micro/nano scale. The analysis， evaluation， and calibration of the measurement characteristics of white light interferometry instruments is a complex and practical work， which is the basis of the research and application of this kind of instruments.Based on the principle of white light interference and the definition and regulation of relevant national standards， the measurement characteristics of the white light interference measurement system and the quantities influencing the system are analyzed theoretically. On this basis， the measurement characteristics of WLIS for metrological application are presented， i.e.， measuring range and indicating error. Then， the theoretical analysis of the above measurement characteristics and their measurement and calibration methods are discussed. The three-axis measurement deviation of the system is calibrated by the standard template of step height and line interval， and the 3D measurement traceability chain based on the white light interference system is constructed.

Keywords： white light interference; measurement characteristics; calibration; traceability

引言

基于白光干涉原理的测量系统，如白光干涉显微镜，是利用白光干涉信号定位被测样品的高度，从而表征测量被测样品微纳尺度的表面形貌[1]，尤其在垂直方向具有亚纳米级的分辨力。（剩余6876字）