基于球阵列的磁阻式时栅位移传感机理和测量模型研究

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关键词：球阵列；时栅传感器；磁场约束；直线位移中图分类号：TH822 文献标识码：Adoi：10.37188/OPE.20253308.1212 CSTR：32169.14.OPE.20253308.1212

Abstract： Aiming at the problem that traditional displacement sensors do not balance both long range and high precision，a new displacement measurement method combining the time-grating principle with the magnetoresistive effect based on a spherical array was proposed. The orthogonally changing magnetic field was constructed by using spatial orthogonal excitation windings，and the magnetic field was accurately constraint-controled by the spatial periodic sensing structure. The mapping relationship between magnetoresistance and displacement was established by using induction windings to pick up the change in the magnetic field，which revealed the displacement sensing mechanism.The model parameters were optimized by electromagnetic simulation，the sensor prototype was developed，the experimental platform was built，and the measurement error experiments of the sensor were conducted. The experimental results show that the sensorhasa measurement error of ±9.4μm and a resolution of 0.1μm within the 512mm measurement range.Micrometer scale measurement accuracy is realized using the millimeter scale sensing unit，which greatly reduces the manufacturing dificulty of the sensor. Furthermore，the measurement range can be increased with the requirements of the applications，and its high resolution measurement can be achieved without the interpolation technology. It can be used in harsh environments such as strong oil polution conditions，which promises the significant academic value and engineering application value.

Key words： spherical array;time-grating sensors； magnetic field constraint； linear displacement

1引言

精密位移测量技术及器件是精密加工制造、国防军工、高端数控机床等领域的关键技术与核心部件[1-3]，其性能直接体现一个国家高端装备的发展水平。（剩余16752字）