基于全视场外差干涉的中心偏差测量技术研究

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关键词：外差干涉；干涉测量；中心偏差；装调设备

中图分类号：TH741 文献标识码：A

Abstract：To meet the increasing demands for greater precision in measuring the centering error of optical lenses，this paper proposed a centering err measurement method based on ful-field heterodyne interferometry.This method used the actual optical axis of the test lens as the measurement reference，obtained the wavefront by measuring the interference fringes generated by the reflected beam of the measured lens and the reference beam，and performed Zernike polynomialfiting.The tilt coefficients of the Zernike polynomials were then converted into the centering error of the test lens，achieving high-precision measurementof the centering error and eliminating the reliance on an external rotational stage.Based on hetero dyne interference and centering error principle，the influence of laser intensity fluctuations and heterodyne frequency fluctuations on wavefront and decenter measurement results was analyzed. The results showed that measurement errors were positively correlated with laser intensity and heterodyne frequency fluctuations and were also afected by the curvature and decenter of the test lens.A decenter measurement system based on heterodyne interferometry was constructed，achieving high-precision decenter measurement， which was compared with simulation results. The simulation results show that the measurement accuracy of the system is not lessthan 0.06′′ ，and experimental results validated the simulations.The study indicates that，compared to traditional autocolimation-based decenter measurement methods，the heterodyne interferometry method can achieve higher measurement accuracy.

Key words： heterodyne interferometry； interferometry technology; centering eror; assembling apparatus

1引言

随着科学技术的发展，光学系统已经广泛用于民用、工业检测、医疗、科研等领域，精密光学仪器及对应的光学系统结构变得越来越复杂，例如遥感相机的口径达到 300～500mm ，实现了0.1m 级的空间分辨率，光学零件作为主要部件对其精度的要求也越来越高[1]。（剩余12651字）