m-M0O2 薄膜中厚度依赖的拉曼光谱研究
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关键词：二氧化钼薄膜；拉曼光谱；原位无损检测中图分类号：0482.31 文献标识码：ADOI：10.37188/CJL.20250234 CSTR：32170.14.CJL.20250234
Thickness-dependent Raman Spectroscopy of m-MoO 2D Flakes
GONG Zhilin 1，2 ， BAO Youzhe³，SHAN Yuwei 1，2* ， XIN Xing"，FAN Dashuo4， SHI Zhiming^， WANG Weiming'，CHANG Kainan’，SONG Ying§，CHENG Jinluo 1，2* （1.GPLPhotonicsLaboratory，tateKeyLaboratoryofLuminescenceScienceandTechnologyChangchunInstituteofOptics， FineMechanicsandPhysics，Chinese AcademyofSciences，Changchun13oo33，China； 2.UniversityofChinese Academy of Sciences，Beijing1Ooo49，China; 3.StateKeyLaboratoryofIntegratedOptoelectronicsandKeyLaboratoryofUVLight-EmitingMaterialsandTechologyof Ministry ofEducation，SchoolofPhysics，Northeast Normal University，Changchun13oo24，China； 4.StateKeyLaboratoryofLuminescenceScienceandTechnology，hangchunInstituteofOptics，FineMechanicsndic， ChineseAcademyofSciences，Changchun130o33，China； StateKeyLboratoryofAdancedManufacturingforOpticalSystems，hangchuIstituteofOptics，ineMechancsdysics Chinese AcademyofSciences，Changchun130033，China） （2号 * Corresponding Authors，E-mail： yuweis@ciomp. ac.cn； xinx902@nenu.edu.cn; jlcheng@ciomp.ac.cn
Abstract：Monoclinic-phase molybdenum dioxide（m-MoO2）two-dimensional（2D）flakes exhibit outstanding properties comparable to thoseofnoble metals，with tunableperformancedepending on flakethickness.This makes it highly promisingforapplications inareas such as environmentalmonitoring and wastewatersensing.Oneofprerequisites for achieving high-performance MoO2 -based devicesisthedevelopmentofan in -situ，rapid，and non-destructive method for measuring flake thickness.In this work，the dependence of the Raman spectra of MoO2 2D thin flakes on flake thickness isinvestigated，providingamethod for in -situ，non-destructive thicknesscharacterization.Excited with 532nm laser，the shift intheRaman characteristic peak at 127cm-1 effectivelyreflects thevariationin flake thickness.Furthermore，byadjusting the polarization of the excitation light，the crystal axis orientation of the Mo02 thin flakecanbecalibrated.TheRaman spectroscopicresultsthus offeraneffectiveandconvenientapproach for monitoring the flake thickness in MoO2 -baseddevicefabrication.
Keywords：m- ∇⋅MoO2 flakes；Raman spectroscopy；in situ non-destructive detection
二氧化钼 （MoO2 属于过渡金属氧化物材料，具有低成本、易获得[2-3]、与贵金属薄膜相比拟的优异性能[2等，在薄膜传感器[2，4]、探测器[5领域表现出极大的应用潜力。（剩余10779字）