集成电路废硫酸制备钛白粉和聚合硫酸铁的环境－经济表现评估

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中图分类号：X70 文献标志码：A 文章编号：1671-8755（2025）02-0046-08

Abstract： The environmental impacts and economic performances of using waste sulfuric acid to prepare titanium dioxide （S1）and polyferric ferric sulfate（S2）were compared by adopting the life cycle assessment and techno-economic analysis method，aiming to provide decision-making support for the selection of high-value and green utilization paths of waste sulfuric acid. The results indicate that under deterministic parameter scenarios，the environmental performance of S2 is superior to that of S1 in 1O environmental impact categories（including global warming potential），while its net profit is 21.62% inferior to that of S1.In light of the inherent uncertainty associated with energy and material inputs in industrialization practices，the short-process S2 system demonstrates significantly lower mean variation rates across all environmental impact categories and economic performance metrics compared to the more complex S1 process. This indicates that direct conversion of waste sulfuric acid to polymeric ferric sulfate ofers more robust environmental -economic performance. Compared to the current “point-to-point” resource recovery approach for titanium dioxide production，the direct preparation of polymeric ferric sulfate offrs a superior option for high-value green utilization of waste sulfuric acid in the integrated circuit industry.

Keywords： Integrated circuit；Waste sulfuric acid utilization；Life cycleassessment；Techno-economic analysis

集成电路产业作为现代电子工业的核心，是支撑经济社会发展和保障国家安全的基础性、先导性产业[1]。（剩余9023字）