基于单模光纤分束器的夏克-哈特曼波前传感器校准的方法

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中图分类号：TH741文献标志码：A

Abstract： A calibration method of Shack-Hartmann wavefront sensor based on single-mode fiber beam splitter is proposed in this paper. The parallel beam and sensor were precisely aligned through single-mode fiber coupling to make the standard centroids of spot array closer to the physical position of the optical axis of the micro-lenses. The calibration setup and calibrating procedure were introduced. And 11 spherical waves with different radius of curvatures were used to verify the calibration accuracy. The experiment results and errors were compared. The results showed that compared with the conventional calibrating method by using plane wave， the average deviation of reconstructed wavefront peak to valley value with proposed method was reduced from 1.024 to0.667λ ，and the root mean square value was reduced from 0.136λ to 0.033，which demonstrated that the proposed method significantly improves the reconstruction accuracy.

Keywords： Shack-Hartmann wavefront sensor; wavefront calibration; wavefront aberration

引言

夏克-哈特曼波前传感器（Shack-Hartmannwavefrontsensor，本文简称为SH波前传感器）主要由微透镜阵列（microlensarray，MLA）与电荷耦合器件（charge-coupleddevice，CCD）组成，是一种广泛应用于自适应光学、光学加工、装调检测和人眼波前像差检测等领域的光电器件。（剩余6377字）