相位调控双向剪切散斑干涉表面变形测量
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关键词：干涉测量；剪切干涉；相位调控；时间相移；表面变形测量中图分类号：TP394.1;O436.1文献标识码：Adoi：10.37188/OPE.20253315.2390 CSTR：32169.14.OPE.20253315.2390
Measurement of surface deformation using phase-manipulated dual-directional shearography
QI Siyuan，FANG Weidong，LIU Yilong，CHANG Qing，GAO Shuai，WANG Shengjia （College of Physics and Optoelectronic Engineering， Harbin Engineering University ， Harbin150001，China） * Corresponding author，E-mail： shengjia. wang@hrbeu. edu. cn
Abstract：To address the issue of the directional sensitivity of conventional shearography，a phase manipulating bidirectional shearography technique is proposed. This technique regards imaging，shearing，and phase-shiftingas the phase transformation of the object wave.First，two Fresnel diffraction lenses are used to generate two laterally displaced images，forming shearograms.Then，by dynamically loading the dual-lens phase masks with different phase baselines on the liquid crystal spatial light modulator，phaseshifted shearograms are generated，and the temporal phase-shifting method is adopted for phase retrieval. The results indicate：the phase manipulating bidirectional shearography can adjust the shearing direction and amount，and introduce controllable temporal phase shifts.When using conventional shearography to reconstruct the deformation phase，the error in the non-shearing direction is 3.5-4.6 times that in the shearing direction.While using bidirectional shearography to reconstruct the deformation phase，the error levels in both shearing directions are similar and the error deviation is 8% . The phase manipulating bidirectional shearography technique has the characteristics of simple structure and high integration，providing an optical interferometry solution with single-wavelength，single-polarization，single-camera，single-aperture for high-precision deformation measurement.
Key words： interferometry；shearography； phase manipulating； temporal phase shift； surface deforma-tion measurement
1引言
剪切散斑干涉技术[1-3]是一种全场、非接触、高精度、高灵敏度的光学测量方法，其核心在于利用两束横向错位的物光形成剪切干涉，无需传统意义上的参考光，被广泛应用于航空航天、精密机械制造、工程材料无损检测等领域[4-6]。（剩余15249字）
