基于非连通金属-介质-金属波导耦合D形谐振腔的多法诺共振传感器

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Abstract： A plasmonics waveguide structure that consist a non-through metal-insulator-metal （MIM） waveguide coupled with a D-shaped cavity was designed. And the transmission properties， magnetic field distribution， refractive index sensing functionality were simulated using the finite element method （FEM）.A multi-Fano resonance phenomenon was clearly observable in the transmisson spectra. The Fano resonances observed in the proposed structure arise from the interaction between the discrete states the Dshaped resonant cavity the continuum state the non-through MIM waveguide.The influence structural parameters on Fano resonance modulation was investigated through systematic parameter adjustments. Additionally，the refractive index sensing properties，based on the Fano resonance， were investigated by varying the refractive index the MIM waveguide's insulator layer. A maximum sensitivity FOM 1155 RIU/nm 40 were achieved， respectively. This research opens up new possbilities for designing exploring high-sensitivity photonic devices，micro-sensors， innovative on-chip sensing architectures for future applications.

Key words： surface plasmon polaritons; metal-insulator-metal （MIM） waveguide; D-shaped resonant cavity; double Fano resonance;refractive index sensor

摘要：本文设计了一种由两个一端封堵的金属-绝缘体-金属（MIM）波导与一个D形腔耦合组成的表面等离激元波导结构。（剩余25426字）