Er3+掺杂AIScN薄膜发光及铁电性能的协同调控

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关键词：AlScN; Er3+ ；光致发光；强铁电性

中图分类号：0482.31 文献标识码：A

DOI：10.37188/CJL.20250023 CSTR：32170.14.CJL.20250023

Abstract：lanthanide ions have abundant luminescent energy levels，with their luminescence intensity and wavelengthaffected bythelatice symmetry.Theregulationofluminescence properties viacontrolablelatice fields can berealizedbyaltering electricfieldsand stressFerroelectric material hasnon-volatile spontaneouspolarization，and itsdirectioncanbereversedorreoriented byelectric fields.Dopinglanthanideionsasluminescencecenters into ferroelectric materialsandutilizing the ferroelectricpolarization field fordynamicregulationoflanthanideions‘lumnescence wavelength and intensitycan significantly improvethe performance of semiconductoroptoelectronic devices. AlScN，with itsdynamicalltunable highremanent polarization，largebandgap，and highcompatibilitywith CMOS processes，ofers new opportunities for constructing novel luminescent devices with multifunctional ferroelectric regulation.This paper investigated the effects of Ers+ doping concentrations on the luminescence and ferroelectric propertiesofAlScNfilms.TheEr'dopingconcentrationrises，andmoreluminescencecentersareincorporated，effectively enhancing the luminescence potential. Notably，a marked increase in luminescence of Er3+ -doped AlScN filmswas achieved at doping concentrations of 3. 6% to 9.4%．However，when the doping concentration exceeded 10% ，a quenching effectledto the decrease ofluminescence，highlighting the importanceof preciselycontrolling the doping limit for optimal performance.Although the increase in Er3+ doping concentration slightly degraded the performance ofAlScN，the remanent polarization remained above 80μC/cm2 at a concentration of 9. 4% ，demonstrating the coexistence of luminescence and robust ferroelectric performance in Er3+ -doped AlScN films.This research fills the gap regardinglanthanideions-dopedAlScNfilms，layingasolidfoundationforthedevelopmentofhighlyintegrated，multifunctionalluminescent devices and potentially catalyzing innovation in the optoelectronic domain.

Keywords：AlScN; Er3+ ;photoluminescence;robust ferroelectricperformance

1引言

稀土离子具有独特的电子结构，使得稀土离子发光材料具有色纯度高、光吸收能力强、发射波长分布区域宽、物理和化学性能稳定等优点，广泛应用于照明、显示和显像等领域[1-5]。（剩余15780字）