氧化锌纳米冷阴极及其X射线源应用

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关键词：氧化锌纳米线；冷阴极；平板电子源；平板X射线源中图分类号：0482.31 文献标识码：ADOI：10.37188/CJL.20240306 CSTR：32170.14.CJL.20240306

Abstract：Due to its excellentfield emission properties，stable chemical properties，and easeoflow-costlarge-area preparation，zinc oxide nanowirehas important applications in large-area cold cathode electron source devices. Many works on the field emission mechanism，performance modulation，and electron source device applications of ZnO nanowire cold cathodes havebeen reported inthe past decades.To further advance the practical applications of ZnO nanowire cold cathodes，it is necessary to summarize the current status and challenges of their development.In this paper，wereview the progressof ZnO nanowire coldcathode inaspects offield emisionproperty，gate structure designand fabrication，andthe X-raysource application，from thepointof view ofthe performancerequirements of large-area cold cathode electron source.Finall，a perspective on future research trends and challenges is given.

ey Words：ZnO nanowire；cold cathode；flat panel electron source；flat panel X-ray sourct

1引言

与传统点电子源相比，大面积冷阴极阵列电子源是一种由大量点电子源阵列构成的面电子源。（剩余28897字）