平面光栅刻划机微定位系统压电校正技术

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关键词：光栅刻划机；微定位系统；定位精度；P-I模型；压电中图分类号：TH74 文献标识码：Adoi：10.37188/0PE.20253314.2220 CSTR：32169.14.OPE.20253314.2220

Micro-positioning error monitoring and piezoelectric correction of plane grating ruling machine

YANG Chunji 1，2 ，LI Wenhao1，YU Hongzhul*，YAO Xuefengl*，ZHANG Bo 1 ，YU Shuo1 （1. Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences， Changchun130033，China; 2. University of Chinese Academy of Sciences，Beijing 1Ooo39，China） * Corresponding author，E-mail： yhz_jl@sina. com. cn;yaoxf@ciomp. ac. cn

Abstract： To addressthe issue of the decline in micro-positioning accuracy caused by the hysteresis nonlin earity characteristic of the piezoelectric ceramic driver during the engraving process of the planar grating engraving machine，a composite control error-compensation method based on the segmented Prandtl - Ishlinskii（PI）model was proposed to enhance the indexing positioning accuracy and stability of the grating engraving. A set of error-monitoring and correction systems for grating micro-positioning with a certain degree of accuracy was designed. By constructing a segmented PI model to describe its nonlinear behavior， the hysteresis characteristics of the piezoelectric ceramic actuator were identified using the least-squares method. The inverse model was used as a feedforward compensation link，combined with closed-loop feedback control to form a composite control strategy，thereby achieving dynamic error correction.Experimental data show that，compared with before adding the PI inverse model feedforward compensation，the positioning error of the grating line has been reduced from ±20nm to within ±10nm . Ensure the consistency of the engraved grooves，apply the calibration of the grating etching division degree to correct the positioning error，providing reliable technical support for the preparation of high-density gratings.Future research willfocus on integrating and optimizing inteligent algorithms to further improve positioning accuracy，as well as exploring the expansion application of this technology in curved surface gratings and variable grating pitch etching.

Key Words： grating writer；micro positioning system；positioning accuracy； P-I model； piezoelectric

1引言

光栅[1-3]作为现代高精度光谱仪器的核心光学元件，其制造能力直接决定了光谱仪器的技术水平。（剩余12994字）